Study of the reducing of defect density in STI etch process

Danilkin, E.E.DanilkinKozulin, R.R.KozulinPolyakov, A.A.PolyakovTrutaeva, M.M.TrutaevaShamiryan, DenisDenisShamiryanIslyaykin, A.A.IslyaykinGutshin, O.P.O.P.Gutshin2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18768Study of the reducing of defect density in STI etch processOral presentation