Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

Zekry, JosephJosephZekrySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanCherman, VladimirVladimirChermanVarela Pedreira, OlallaOlallaVarela PedreiraWang, BoBoWangEl Ghannudi, HamzaHamzaEl GhannudiCelis, Jean-PierreJean-PierreCelisPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-212021-10-212013-010924-4247https://imec-publications.be/handle/20.500.12860/23435Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranesJournal articlehttp://dx.doi.org/10.1016/j.sna.2012.09.034