Observation of oxide breakdown and its effects on the characteristics of ultra-thin-oxide nMOSFETs

Henson, W. K.W. K.HensonYang, N.N.YangWortman, J. J.J. J.Wortman2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3500Observation of oxide breakdown and its effects on the characteristics of ultra-thin-oxide nMOSFETsJournal article