Impact of substrate rotation and temperature on the mobility and series resistance of triple-gate SOI nMOSFETs

de Souza, M.M.de SouzaPavanello, M.A.M.A.PavanelloMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18799Impact of substrate rotation and temperature on the mobility and series resistance of triple-gate SOI nMOSFETsProceedings paper