Forester, LynnLynnForesterCoenegrachts, BartBartCoenegrachtsStone, M.M.StoneMeynen, HermanHermanMeynenGrillaert, JoostJoostGrillaertVan den hove, LucLucVan den hove2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/158Development of a global planarization process without CMPProceedings paper