Extended defects created by helium implantation at different temperature in germanium

Rousselet, S.S.RousseletDavid, M.L.M.L.DavidBeaufort, M.F.M.F.BeaufortPailloux, F.F.PaillouxBarbot, J.F.J.F.BarbotSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14400Extended defects created by helium implantation at different temperature in germaniumOral presentation