A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap

Kondoh, EiichiEiichiKondohConard, ThierryThierryConardBrijs, BertBertBrijsJin, S.S.JinBender, HugoHugoBenderde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3570A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti capJournal article