Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric

Aksenov, GermanGermanAksenovDe Roest, DavidDavidDe RoestVerdonck, PatrickPatrickVerdonckDultsev, F.N.F.N.DultsevMarsik, PremaPremaMarsikShamiryan, DenisDenisShamiryanArai, HHAraiTakamura, N.N.TakamuraBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14888Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectricProceedings paper