Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance

Bogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseMoussa, AlainAlainMoussaMody, JayJayModyEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseel2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16770Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectanceOral presentation