Meta-materials approach to sensitivity enhancement of MEMS BAW resonant sensors

Rottenberg, XavierXavierRottenbergZanaty, MohamedMohamedZanatyKhaled, AhmedAhmedKhaledJansen, RoelofRoelofJansenCherman, VladimirVladimirChermanAbbas, MohamedMohamedAbbasWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23017Meta-materials approach to sensitivity enhancement of MEMS BAW resonant sensorsProceedings paper