Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposure

Pollentier, IvanIvanPollentierVesters, YannickYannickVestersJiang, JingJingJiangVanelderen, PieterPieterVanelderenDe Simone, DaniloDaniloDe Simone2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29203Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposureProceedings paper10.1117/12.2281449