Plasma-assisted ALD of LiPO(N) for solid state batteries

Put, BrechtBrechtPutMees, MaartenMaartenMeesHornsveld, NorahNorahHornsveldSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezVereecken, PhilippePhilippeVereeckenKessels, ErwinErwinKesselsCreatore, MariadrianaMariadrianaCreatore2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27171Plasma-assisted ALD of LiPO(N) for solid state batteriesProceedings paperhttp://ecst.ecsdl.org/content/75/20/61.abstract