Suh, Hyo SeonHyo SeonSuhNair, Vineet VijayakrishnanVineet VijayakrishnanNairRincon Delgadillo, PaulinaPaulinaRincon DelgadilloDoise, JanJanDoiseLorusso, GianGianLorussoNealey, PaulPaulNealeyMonreal, VictorVictorMonrealBaskaran, DurairajDurairajBaskaranCao, YiYiCaoPadmanaban, MunirathnaMunirathnaPadmanabanLi, JinJinLiKato, TakeshiTakeshiKatoSutani, TakumichiTakumichiSutaniIshimoto, ToruToruIshimotoIkota, MasamiMasamiIkotaKoshihara, ShunsukeShunsukeKoshihara2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31881Impact of annealing temperature on DSA process: toward faster assembly kineticsProceedings paperhttps://doi.org/10.1117/12.2299496