Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics

Aguilera, LidiaLidiaAguileraPolspoel, WouterWouterPolspoelVandervorst, WilfriedWilfriedVandervorstNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11632Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectricsOral presentation