Rosseel, ErikErikRosseelOrtolland, ClaudeClaudeOrtollandHikavyy, AndriyAndriyHikavyySchram, TomTomSchramFalepin, AnneliesAnneliesFalepinHoffmann, Thomas Y.Thomas Y.HoffmannVandervorst, WilfriedWilfriedVandervorstAmeen, MikeMikeAmeenRubin, LeonardLeonardRubin2021-10-182021-10-182010-10https://imec-publications.be/handle/20.500.12860/17910Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion ImplantationMeeting abstract