Thermal desorption issues related to silicidation and back-end metallization

Li, H.H.LiVereecke, GuyGuyVereeckeSchaekers, MarcMarcSchaekersBaklanov, MikhaïlMikhaïlBaklanovSleeckx, ErikErikSleeckxMaex, KarenKarenMaexFroyen, L.L.Froyen2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3619Thermal desorption issues related to silicidation and back-end metallizationOral presentation