Full loop equivalent circuit model for plasma induced damage simulation

Hiblot, GaspardGaspardHiblotVan der Plas, GeertGeertVan der Plas2021-10-252021-10-2520180093-3813https://imec-publications.be/handle/20.500.12860/30894Full loop equivalent circuit model for plasma induced damage simulationJournal articlehttps://ieeexplore.ieee.org/document/8418470