Chang, XinyueXinyueChangOprins, HermanHermanOprinsLofrano, MelinaMelinaLofranoCherman, VladimirVladimirChermanVermeersch, BjornBjornVermeerschDiaz Fortuny, JavierJavierDiaz FortunyPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiDe Wolf, IngridIngridDe Wolf2023-11-292023-08-072023-08-092023-11-2920232380-632XWOS:001027381700060https://imec-publications.be/handle/20.500.12860/42294Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacksProceedings paper10.1109/IITC/MAM57687.2023.101548979-8-3503-1097-9WOS:001027381700060