Trager-Cowan, CarolCarolTrager-CowanMcColl, D.D.McCollSweeney, F.F.SweeneyGrimson, S.T.F.S.T.F.GrimsonTreguer, J.-F.J.-F.TreguerMohammed, A.A.MohammedMiddleton, P.G.P.G.MiddletonManson-Smith, S.K.S.K.Manson-SmithO'Donnell, K.P.K.P.O'DonnellVan der Stricht, WimWimVan der StrichtMoerman, IngridIngridMoermanDemeester, PietPietDemeesterWu, M.F.M.F.WuVantomme, AndreAndreVantommeZubia, D.D.ZubiaHersee, S.D.S.D.Hersee2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4998Probing nitride thin films in 3-dimensions using a variable energy electron beamProceedings paper