A new scaling issue in the electrical behavior of damascene versus plasma-etched interconnects

Proost, JorisJorisProostConard, ThierryThierryConardBoullart, WernerWernerBoullartGrillaert, JoostJoostGrillaertMaex, KarenKarenMaex2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2882A new scaling issue in the electrical behavior of damascene versus plasma-etched interconnectsProceedings paper