Erdmann, AndreasAndreasErdmannXu, DongboDongboXuEvanschitzky, PeterPeterEvanschitzkyPhilipsen, VickyVickyPhilipsenLuong, VuVuLuongHendrickx, EricEricHendrickx2021-10-242021-10-2420172192-8584https://imec-publications.be/handle/20.500.12860/28310Characterization and mitigation of 3D mask effectsJournal articlehttps://www.degruyter.com/view/j/aot.2017.6.issue-3-4/aot-2017-0019/aot-2017-0019.xml