MOCVD processes for electronic materials adopting Bi(C6H5)3 percursor: kinetics and mechanisms

Bedoya, C.C.BedoyaCondorelli, G.G.CondorelliAnastasi, G.G.AnastasiLisoni, JuditJuditLisoniWouters, DirkDirkWoutersFragalà, I.L.I.L.Fragalà2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8553MOCVD processes for electronic materials adopting Bi(C6H5)3 percursor: kinetics and mechanismsProceedings paper