Engineering of an insulating buffer and use of AIN interlayers: two optimisations for AlGaN-GaN HEMT-like structures

Bougrioua, Z.Z.BougriouaMoerman, IngridIngridMoermanNistor, L.L.NistorVan Daele, B.B.Van DaeleMonroy, E.E.MonroyPalacios, T.T.PalaciosCalle, F.F.CalleLeroux, M.M.Leroux2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7252Engineering of an insulating buffer and use of AIN interlayers: two optimisations for AlGaN-GaN HEMT-like structuresJournal article