De Gendt, StefanStefanDe GendtLux, MarcelMarcelLuxClaes, MartineMartineClaesVan Hoeymissen, JanJanVan HoeymissenConard, ThierryThierryConardWorth, W.W.WorthLagrange, SébastienSébastienLagrangeBergman, E.E.BergmanJassal, A. S.A. S.JassalMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4254Evaluation of ozonated water spray for resist cleaning applicationsProceedings paper