Grill, A.A.GrillPatel, V.V.PatelRodbell, K.P.K.P.RodbellHuang, E.E.HuangBaklanov, MikhaïlMikhaïlBaklanovMoguilnikov, KonstantinKonstantinMoguilnikovToney, M.M.ToneyKim, H.C.H.C.Kim2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7629Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative studyJournal article