Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Bogdanowicz, JanuszJanuszBogdanowiczDortu, FabianFabianDortuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstShaughnessy, DerrickDerrickShaughnessySalnick, AlexAlexSalnickNicolaides, LenaLenaNicolaides2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13410Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectanceMeeting abstract