Kaczer, BenBenKaczerClima, SergiuSergiuClimaTomida, KazuyukiKazuyukiTomidaGovoreanu, BogdanBogdanGovoreanuPopovici, Mihaela IoanaMihaela IoanaPopoviciKim, Min-SooMin-SooKimSwerts, JohanJohanSwertsWang, W. C.W. C.WangAfanasiev, ValeriValeriAfanasievVerhulst, AnneAnneVerhulstPourtois, GeoffreyGeoffreyPourtoisGroeseneken, GuidoGuidoGroesenekenJurczak, GosiaGosiaJurczak2021-10-212021-10-2120131071-1023https://imec-publications.be/handle/20.500.12860/22563Considerations for further scaling of metal–insulator–metal DRAM capacitorsJournal articlehttp://dx.doi.org/10.1116/1.4767125