Surface preparation techniques for high-k deposition on Ge substrates

Van Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabieBrijs, BertBertBrijsCaymax, MattyMattyCaymaxConard, ThierryThierryConardOnsia, BartBartOnsiaPuurunen, RiikkaRiikkaPuurunenRichard, OlivierOlivierRichardVan Steenbergen, JanJanVan SteenbergenZhao, ChaoChaoZhaoMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11391Surface preparation techniques for high-k deposition on Ge substratesProceedings paper