Philipsen, VickyVickyPhilipsenMesuda, KeiKeiMesudaDe Bisschop, PeterPeterDe BisschopErdmann, AndreasAndreasErdmannCitarella, GiuseppeGiuseppeCitarellaEvanschitzky, PeterPeterEvanschitzkyBirkner, RobertRobertBirknerRichter, RigoRigoRichterScherübl, ThomasThomasScherübl2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12703Impact of alternative mask stacks on the imaging performance at NA 1.20 and aboveProceedings paper