Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications

Rodriguez, LeonardLeonardRodriguezAdelmann, ChristophChristophAdelmannSutens, BenBenSutensWinroth, GustafGustafWinrothDelabie, AnneliesAnneliesDelabieGronheid, RoelRoelGronheidVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23005Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applicationsMeeting abstracthttp://www2.avs.org/symposium/avs60/pdfs/abstractbook.pdf