On the dielectric material properties for thin film integrated RF and microwave applications

Pieters, PhilipPhilipPietersBrebels, StevenStevenBrebelsCarchon, GeertGeertCarchonVaesen, KristofKristofVaesenDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyneMertens, RobertRobertMertens2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3748On the dielectric material properties for thin film integrated RF and microwave applicationsJournal article