Simulation of boron diffusion in strained Si1-xGex epitaxial layers

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmakerDecoutere, StefaanStefaanDecoutereCaymax, MattyMattyCaymax2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4686Simulation of boron diffusion in strained Si1-xGex epitaxial layersProceedings paper