Piezoresistivity in ultra-thin boron-doped and surface conductive undoped nanocrystalline diamond membranes

Drijkoningen, SienSienDrijkoningenJanssens, StoffelStoffelJanssensHaenen, KenKenHaenen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25227Piezoresistivity in ultra-thin boron-doped and surface conductive undoped nanocrystalline diamond membranesOral presentation