Fundamental limitation of van der Waals homoepitaxy by stacking fault formation in WSe2

Mortelmans, WouterWouterMortelmansNalin Mehta, AnkitAnkitNalin MehtaBalaji, YashwanthYashwanthBalajiEl Kazzi, SalimSalimEl KazziSergeant, StefanieStefanieSergeantHoussa, MichelMichelHoussaDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMerckling, ClementClementMerckling2021-10-292021-10-2920202053-1583https://imec-publications.be/handle/20.500.12860/35615Fundamental limitation of van der Waals homoepitaxy by stacking fault formation in WSe2Journal articlehttps://doi.org/10.1088/2053-1583/ab70ec