Jonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelTakagi, NoriakiNoriakiTakagiWatanabe, HidehiroHidehiroWatanabeGallagher, EmilyEmilyGallagher2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25438Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scannerProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207817