De Schepper, PeterPeterDe SchepperHansen, TerjeTerjeHansenAltamirano Sanchez, EfrainEfrainAltamirano SanchezVaglio Pret, AlessandroAlessandroVaglio PretEl Otell, ZiadZiadEl OtellBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220141537-1646https://imec-publications.be/handle/20.500.12860/23721Line edge and width roughness smoothing by plasma treatmentJournal articlehttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1674528