Van Steenwinckel, DavidDavidVan SteenwinckelGronheid, RoelRoelGronheidVan Roey, FriedaFriedaVan RoeyWillems, PatrickPatrickWillemsLammers, Jeroen H.Jeroen H.Lammers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14681A novel method for characterizing resist performanceJournal article