Hellin, DavidDavidHellinRip, JensJensRipDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensVinckier, ChrisChrisVinckier2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10565Metal analysis methodology for novel materials in IC manufacturingProceedings paper