Roels, JorisJorisRoelsMaes, BjornBjornMaesBaets, RoelRoelBaetsVan Thourhout, DriesDriesVan Thourhout2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17897Integrated optomechanical circuitsProceedings paper