Leonov, VladimirVladimirLeonovCreten, YbeYbeCretenDe Moor, PietPietDe MoorDu Bois, BertBertDu BoisGoessens, ClausClausGoessensGrietens, BobBobGrietensMerken, PatrickPatrickMerkenPerova, Natalia A.Natalia A.PerovaRuttens, GerlindeGerlindeRuttensVan Hoof, ChrisChrisVan HoofVerbist, AgnesAgnesVerbistVermeiren, JanJanVermeiren2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7794Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICsProceedings paper