Urbanowicz, AdamAdamUrbanowiczShamiryan, DenisDenisShamiryanZaka, AlbanAlbanZakaVerdonck, PatrickPatrickVerdonckDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/18115Effects of He plasma pre-treatment on low-k damage during post Cu surface ceaning with NH3 plasmaJournal article