Adelmann, ChristophChristophAdelmannLehnen, PeerPeerLehnenRagnarsson, Lars-AkeLars-AkeRagnarssonConard, ThierryThierryConardFranquet, AlexisAlexisFranquetChang, VincentVincentChangRohr, ErikaErikaRohrMeersschaut, JohanJohanMeersschautBoissiere, OlivierOlivierBoissiereLohe, ChristophChristophLoheSchram, TomTomSchramVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13282Thermally-stable high effective work function TaCN and Ta2N films for pMOS metal gate applicationsProceedings paper