Heterogeneous nano- to wide-scale co-integration of beyond-Si and Si CMOS devices to enhance future electronics

Thean, AaronAaronTheanCollaert, NadineNadineCollaertRadu, IulianaIulianaRaduWaldron, NiamhNiamhWaldronMerckling, ClementClementMercklingWitters, LiesbethLiesbethWittersLoo, RogerRogerLooMitard, JeromeJeromeMitardRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstVeloso, AnabelaAnabelaVelosoYakimets, DmitryDmitryYakimetsHuynh Bao, TrongTrongHuynh BaoChiappe, DanieleDanieleChiappeVaysset, AdrienAdrienVayssetZografos, OdysseasOdysseasZografosCaymax, MattyMattyCaymaxHuyghebaert, CedricCedricHuyghebaertBarla, KathyKathyBarlaSteegen, AnAnSteegen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25989Heterogeneous nano- to wide-scale co-integration of beyond-Si and Si CMOS devices to enhance future electronicsProceedings paperhttp://ecst.ecsdl.org/content/66/4/3.abstract