Trimming of silicon ring resonator by electron beam induced compaction

Schrauwen, JonathanJonathanSchrauwenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-06https://imec-publications.be/handle/20.500.12860/14450Trimming of silicon ring resonator by electron beam induced compactionProceedings paper