IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding Mechanism

Chancerel, FrancoisFrancoisChancerelUrban, PeterPeterUrbanSlabbekoorn, JohnJohnSlabbekoornHalas, SimonSimonHalasBravin, JulianJulianBravinBrems, StevenStevenBremsUhrmann, ThomasThomasUhrmannWimplinger, MarkusMarkusWimplingerPhommahaxay, AlainAlainPhommahaxayBeyne, EricEricBeyne2025-04-102024-12-072025-04-102024979-8-3503-7599-20569-5503WOS:001260983500056https://imec-publications.be/handle/20.500.12860/44942IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding MechanismProceedings paper10.1109/ECTC51529.2024.00063979-8-3503-7598-5WOS:001260983500056