Williams, OliverOliverWilliamsMortet, VincentVincentMortetDaenen, MichaelMichaelDaenenHaenen, KenKenHaenen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13228Nanocrystalline diamond enhanced thickness shear mode resonatorJournal article