Functionality, yield and reliability analysis of SiGe micro-mirrors using automated optical measurement techniques

De Wolf, IngridIngridDe WolfDe Coster, JeroenJeroenDe CosterVarela Pedreira, OlallaOlallaVarela PedreiraHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15194Functionality, yield and reliability analysis of SiGe micro-mirrors using automated optical measurement techniquesProceedings paper