Polycrystalline silicon-germanium electrode contact technology improvement for MEMS applications

Claes, GertGertClaesSeveri, SimoneSimoneSeveriDecoutere, StefaanStefaanDecoutereCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16878Polycrystalline silicon-germanium electrode contact technology improvement for MEMS applicationsProceedings paper