Mitigation of the etch-induced intra-field overlay contribution

van Haren, RichardRichardvan HarenYildirim, OktayOktayYildirimMouraille, OrionOrionMouraillevan Dijk, LeonLeonvan DijkKumar, KaushikKaushikKumarFeurprier, YannickYannickFeurprierJehoul, ChristianeChristianeJehoulHermans, JanJanHermans2023-06-062022-09-082023-02-162023-06-062022978-1-5106-4987-30277-786XWOS:000844514700012https://imec-publications.be/handle/20.500.12860/40385Mitigation of the etch-induced intra-field overlay contributionProceedings paper10.1117/12.2614255978-1-5106-4988-0WOS:000844514700012