Zavyalova, LenaLenaZavyalovaSu, IreneIreneSuJang, StephenStephenJangCobb, JonathanJonathanCobbWard, BrianBrianWardSorensen, JacobJacobSorensenSong, HuaHuaSongGao, WeiminWeiminGaoLucas, KevinKevinLucasLorusso, GianGianLorussoHendrickx, EricEricHendrickx2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18405EUV modeling accruracy and integration requirements for the 16nm nodeProceedings paper